{"id":1563,"date":"2026-08-29T05:54:00","date_gmt":"2026-08-28T20:54:00","guid":{"rendered":"https:\/\/onepress.co.kr\/index.php\/briefing\/2026-08-29-supersonic-vortex-window-vi\/"},"modified":"2026-08-29T05:54:00","modified_gmt":"2026-08-28T20:54:00","slug":"2026-08-29-supersonic-vortex-window-vi","status":"publish","type":"briefing","link":"https:\/\/onepress.co.kr\/index.php\/briefing\/2026-08-29-supersonic-vortex-window-vi\/","title":{"rendered":"M\u1ed9t d\u00f2ng xo\u00e1y si\u00eau \u00e2m t\u00e1ch kh\u00ed v\u00e0 ch\u00e2n kh\u00f4ng kh\u00f4ng c\u00f3 ch\u1ea5t r\u1eafn t\u1ea1o ra t\u1ef7 s\u1ed1 \u00e1p su\u1ea5t 200 trong l\u1ed7 m\u1edf 15 mm."},"content":{"rendered":"

2026-08-29 05:54 KST<\/strong><\/p>\n

C\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u t\u1ea1i Riken v\u00e0 \u0110\u1ea1i h\u1ecdc Khoa h\u1ecdc v\u00e0 C\u00f4ng ngh\u1ec7 Nagaoka \u1edf Nh\u1eadt B\u1ea3n \u0111\u00e3 t\u0103ng t\u1ef7 l\u1ec7 \u00e1p su\u1ea5t c\u1ee7a \u201cc\u1eeda s\u1ed5 xo\u00e1y\u201d, v\u1ed1n ph\u00e2n chia hai kh\u00f4ng gian ch\u1ec9 v\u1edbi m\u1ed9t xo\u00e1y kh\u00ed si\u00eau \u00e2m kh\u00f4ng c\u00f3 m\u00e0ng r\u1eafn, l\u00ean t\u1ed1i \u0111a kho\u1ea3ng 200. L\u1ed7 c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 15 mm \u0111\u01b0\u1ee3c \u0111\u1ec3 m\u1edf, cho ph\u00e9p c\u00e1c ch\u00f9m \u00e1nh s\u00e1ng ho\u1eb7c h\u1ea1t \u0111i qua.<\/p>\n

\u0110i\u1ec1u n\u00e0y kh\u00f4ng c\u00f3 ngh\u0129a l\u00e0 c\u00f3 m\u1ed9t m\u1ed1i li\u00ean h\u1ec7 tr\u1ef1c ti\u1ebfp gi\u1eefa b\u1ea7u kh\u00ed quy\u1ec3n \u1edf m\u1ed9t ph\u00eda v\u00e0 m\u1ed9t kh\u00f4ng gian ho\u00e0n to\u00e0n gi\u1ed1ng nh\u01b0 ch\u00e2n kh\u00f4ng. Kho\u1ea3ng 200 l\u00e0 gi\u00e1 tr\u1ecb th\u1eed nghi\u1ec7m c\u1ee7a m\u1ed9t thi\u1ebft b\u1ecb \u00e1p su\u1ea5t th\u1ea5p\/d\u00f2ng ch\u1ea3y th\u1ea5p v\u00e0 khi hai thi\u1ebft b\u1ecb \u0111\u01b0\u1ee3c k\u1ebft n\u1ed1i n\u1ed1i ti\u1ebfp, gi\u00e1 tr\u1ecb kho\u1ea3ng 4.550 kh\u00f4ng ph\u1ea3i l\u00e0 th\u1eed nghi\u1ec7m m\u00e0 l\u00e0 \u01b0\u1edbc t\u00ednh \u0111\u01b0\u1ee3c t\u00ednh to\u00e1n t\u1eeb hi\u1ec7u su\u1ea5t c\u1ee7a m\u1ed9t thi\u1ebft b\u1ecb.<\/p>\n

Kh\u00ed ho\u1ea1t \u0111\u1ed9ng nh\u01b0 m\u1ed9t c\u1eeda s\u1ed5 nh\u01b0 th\u1ebf n\u00e0o<\/h2>\n

Trong xo\u00e1y t\u1ef1 do, c\u00e0ng g\u1ea7n t\u00e2m th\u00ec d\u00f2ng ch\u1ea3y c\u00e0ng nhanh v\u00e0 \u00e1p su\u1ea5t c\u00e0ng th\u1ea5p. C\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u \u0111\u00e3 xoay m\u1ed9t lu\u1ed3ng kh\u00ed si\u00eau \u00e2m \u0111\u1ec3 t\u1ea1o ra m\u1ed9t gradient \u00e1p su\u1ea5t gi\u1eefa ph\u00eda \u00e1p su\u1ea5t cao v\u00e0 \u00e1p su\u1ea5t th\u1ea5p. S\u1ef1 v\u1eafng m\u1eb7t c\u1ee7a ch\u1ea5t r\u1eafn s\u1ebd tr\u00e1nh \u0111\u01b0\u1ee3c v\u1ea5n \u0111\u1ec1 tia laser m\u1ea1nh ho\u1eb7c ch\u00f9m h\u1ea1t l\u00e0m n\u00f3ng ho\u1eb7c l\u00e0m v\u1ee1 c\u1eeda s\u1ed5.<\/p>\n

B\u1ea1n \u0111\u00e3 l\u00e1i xe g\u00ec kh\u00e1c bi\u1ec7t?<\/h2>\n

Trong ph\u01b0\u01a1ng ph\u00e1p hi\u1ec7n t\u1ea1i, ch\u00eanh l\u1ec7ch \u00e1p su\u1ea5t xung quanh \u0111\u01b0\u1ee3c t\u00ednh b\u1eb1ng ch\u00eanh l\u1ec7ch \u00e1p su\u1ea5t c\u1ee7a d\u00f2ng xo\u00e1y l\u00fd t\u01b0\u1edfng v\u00e0 t\u1ef7 l\u1ec7 \u00e1p su\u1ea5t l\u00e0 kho\u1ea3ng 5. Ph\u01b0\u01a1ng ph\u00e1p m\u1edbi c\u1ed1 t\u00ecnh t\u1ea1o ra s\u1ef1 kh\u00e1c bi\u1ec7t l\u1edbn b\u1eb1ng c\u00e1ch nh\u1ea5n nhi\u1ec1u h\u01a1n v\u00e0o ph\u00eda \u00e1p su\u1ea5t cao v\u00e0 k\u00e9o nhi\u1ec1u h\u01a1n \u1edf ph\u00eda \u00e1p su\u1ea5t th\u1ea5p. Sau \u0111\u00f3, d\u00f2ng kh\u00ed t\u1ef1 \u0111i\u1ec1u ch\u1ec9nh \u0111\u01b0\u1eddng \u0111i v\u00e0 \u0111\u1ed9 r\u1ed9ng, duy tr\u00ec t\u1ef7 s\u1ed1 \u00e1p su\u1ea5t kho\u1ea3ng 70 v\u00e0 \u0111\u1ea1t t\u1ed1i \u0111a kho\u1ea3ng 200 trong \u0111i\u1ec1u ki\u1ec7n \u00e1p su\u1ea5t th\u1ea5p.<\/p>\n

\"M\u1ed9t
\u0110\u00e2y l\u00e0 h\u00ecnh \u1ea3nh t\u1ea1o b\u1eb1ng AI \u0111\u1ec3 gi\u1ea3i th\u00edch ch\u1ee7 \u0111\u1ec1, kh\u00f4ng ph\u1ea3i \u1ea3nh ch\u1ee5p s\u1ef1 ki\u1ec7n, quan s\u00e1t hay th\u00ed nghi\u1ec7m th\u1ef1c t\u1ebf.<\/figcaption><\/figure>\n

C\u00e1ch ph\u00e2n bi\u1ec7t 200 v\u00e0 4.550<\/h2>\n

Kho\u1ea3ng 200 l\u00e0 t\u1ef7 l\u1ec7 \u00e1p su\u1ea5t t\u1ed1i \u0111a \u0111\u01b0\u1ee3c \u0111o b\u1eb1ng m\u1ed9t thi\u1ebft b\u1ecb trong th\u1ef1c t\u1ebf. Gi\u00e1 tr\u1ecb x\u1ea5p x\u1ec9 4.550 c\u00f3 th\u1ec3 x\u1ea3y ra khi hai thi\u1ebft b\u1ecb \u0111\u01b0\u1ee3c m\u1eafc n\u1ed1i ti\u1ebfp l\u00e0 \u01b0\u1edbc t\u00ednh l\u00fd thuy\u1ebft d\u1ef1a tr\u00ean c\u00e1c ph\u00e9p \u0111o n\u00e0y. N\u00f3 ph\u1ea3i \u0111\u01b0\u1ee3c x\u00e1c nh\u1eadn trong th\u00ed nghi\u1ec7m ti\u1ebfp theo xem d\u00f2ng ch\u1ea3y c\u00f3 \u1ed5n \u0111\u1ecbnh hay kh\u00f4ng khi nhi\u1ec1u giai \u0111o\u1ea1n \u0111\u01b0\u1ee3c k\u1ebft n\u1ed1i.<\/p>\n

T\u00f4i c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng n\u00f3 \u1edf \u0111\u00e2u?<\/h2>\n

Hi\u1ec7n t\u1ea1i, \u0111\u00e2y l\u00e0 c\u00f4ng ngh\u1ec7 n\u1ec1n t\u1ea3ng \u0111\u1ec3 ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb tho\u00e1t kh\u00ed nh\u1ecf h\u01a1n \u0111\u1ec3 s\u1eed d\u1ee5ng trong m\u00e1y gia t\u1ed1c ion n\u1eb7ng th\u1ebf h\u1ec7 ti\u1ebfp theo c\u1ee7a Riken. C\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u c\u0169ng coi vi\u1ec7c ch\u1eb7n h\u1ea1t xung quanh c\u00e1c ngu\u1ed3n s\u00e1ng EUV b\u00e1n d\u1eabn, thi\u1ebft b\u1ecb ph\u00e2n t\u00edch ch\u00e2n kh\u00f4ng v\u00e0 thi\u1ebft b\u1ecb th\u00ed nghi\u1ec7m kh\u00f4ng gian l\u00e0 nh\u1eefng kh\u1ea3 n\u0103ng c\u00f3 th\u1ec3 x\u1ea3y ra. Tuy nhi\u00ean, ch\u01b0a c\u00f3 \u1ee9ng d\u1ee5ng n\u00e0o \u0111\u01b0\u1ee3c ch\u1ee9ng minh tr\u00ean thi\u1ebft b\u1ecb th\u01b0\u01a1ng m\u1ea1i.<\/p>\n

X\u00e1c nh\u1eadn ti\u1ebfp theo l\u00e0 g\u00ec<\/h2>\n

Nh\u1eefng c\u1ea3i thi\u1ec7n v\u1ec1 t\u1ef7 l\u1ec7 \u00e1p su\u1ea5t \u0111\u00e3 \u0111\u01b0\u1ee3c x\u00e1c nh\u1eadn kh\u00f4ng ch\u1ec9 trong kh\u00f4ng kh\u00ed m\u00e0 c\u00f2n trong argon v\u00e0 helium, nh\u01b0ng v\u1eabn duy tr\u00ec \u0111\u01b0\u1ee3c kh\u1ea3 n\u0103ng v\u1eadn h\u00e0nh l\u00e2u d\u00e0i, thu h\u1ed3i kh\u00ed, ch\u1ea5t l\u01b0\u1ee3ng ch\u00f9m tia v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u1ebft n\u1ed1i nhi\u1ec1u giai \u0111o\u1ea1n. T\u1ef7 l\u1ec7 \u00e1p su\u1ea5t giai \u0111o\u1ea1n th\u1ef1c t\u1ebf v\u00e0 th\u1eddi gian duy tr\u00ec ph\u1ea3i \u0111\u01b0\u1ee3c x\u00e1c nh\u1eadn trong b\u00e0i b\u00e1o v\u00e0 c\u00e1c th\u1eed nghi\u1ec7m Ricken ti\u1ebfp theo. \u0110i\u1ec1u quan tr\u1ecdng l\u00e0 d\u00f2ng ch\u1ea3y t\u1ef1 n\u00f3 \u0111\u00e3 tr\u1edf th\u00e0nh ranh gi\u1edbi ch\u1ee9 kh\u00f4ng ph\u1ea3i l\u00e0 x\u00e2y n\u00ean m\u1ed9t b\u1ee9c t\u01b0\u1eddng.<\/p>\n

Ngu\u1ed3n g\u1ed1c v\u00e0 ki\u1ec3m ch\u1ee9ng \u0111\u1ed9c l\u1eadp<\/h2>\n

Review of Scientific Instruments original paper<\/a><\/p>\n

RIKEN and Nagaoka University official release<\/a><\/p>\n

RIKEN technical background and measured-data explanation<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

C\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u t\u1ea1i RIKEN v\u00e0 \u0110\u1ea1i h\u1ecdc C\u00f4ng ngh\u1ec7 Nagaoka \u0111\u00e3 ch\u1ee9ng minh t\u1ef7 l\u1ec7 \u00e1p su\u1ea5t l\u00ean t\u1edbi kho\u1ea3ng 200 trong c\u1eeda s\u1ed5 xo\u00e1y si\u00eau \u00e2m c\u00f3 l\u1ed7 m\u1edf 15 mm. Gi\u00e1 tr\u1ecb 4.550 l\u1ea7n k\u1ebft n\u1ed1i hai giai \u0111o\u1ea1n v\u1eabn ch\u1ec9 l\u00e0 d\u1ef1 \u0111o\u00e1n \u0111\u01b0\u1ee3c t\u00ednh to\u00e1n.<\/p>\n","protected":false},"featured_media":0,"template":"","meta":[],"class_list":["post-1563","briefing","type-briefing","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/onepress.co.kr\/index.php\/wp-json\/wp\/v2\/briefing\/1563","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/onepress.co.kr\/index.php\/wp-json\/wp\/v2\/briefing"}],"about":[{"href":"https:\/\/onepress.co.kr\/index.php\/wp-json\/wp\/v2\/types\/briefing"}],"wp:attachment":[{"href":"https:\/\/onepress.co.kr\/index.php\/wp-json\/wp\/v2\/media?parent=1563"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}